eMudhra says they used an HSM for the keys:
https://bugzilla.mozilla.org/show_bug.cgi?id=2083449#c11
> The hardware used for each of the issuers is in the attached file. These HSMs are FIPS 140-2 Level 3 compliant.
> The Ultimaco devices were used to generate the ECC, RSA key pairs for the issuers.
@q3k funny how literally everyone always introduces an "l" into "Utimaco".